Education and degrees

PhD 1995, Helsinki University of Technology,
Dept. of Electrical and Communications Engineering. Thesis: "Plasma
Etching in Microdevice Fabrication; Thin Film and Process Integration
Aspects

M.Sc. 1986, University of Helsinki, Physics
Dept. Thesis (in Finnish) “Anisotropic wet etching of silicon for pressure
sensor diaphragm fabrication”, accepted with eximia cum laude.

BSc, 1985, University of Helsinki, Physics, Chemistry, Theoretical physics

Books and book chapters

S. Franssila: Introduction to Microfabrication, 2^nd edition, John Wiley & Sons, 2010

Sami Franssila & Lauri Sainiemi: “RIE”, an entry in Encyclopedia of Micro- and nanofluidics, Dongqing Li, editor, Springer, 2^nd edition 2014

Sami Franssila & Santeri Tuomikoski: “MEMS lithography”, a chapter in Handbook of silicon based MEMS materials and technologies”, Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka (eds.) Elsevier, 2^nd edition 2015

Franz Lärmer, Sami Franssila, Lauri Sainiemi & Kai Kolari: “DRIE”, a chapter in Handbook of silicon based MEMS materials and technologies, Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka (eds.), Elsevier, 2^nd edition 2015

Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Krockel, Veikko Lindroos (eds): Handbook of silicon based MEMS materials and technologies, 2^nd edition, Elsevier 2015

Sami Franssila, Cristina Davis, Michael K. LeVasseur, Zhu Cao, Levent Yobas: Microfluidics and BioMEMS in silicon, a chapter in Veikko Lindroos, Teruaki Motooka, Sami Franssila, Mervi Paulasto-Krockel, Markku Tilli, Veli-Matti Airaksinen, (eds): Handbook of silicon based MEMS materials and technologies, 2^nd edition, Elsevier 2015

Review articles

Cecilia A Brunello, Ville Jokinen, Prasanna Sakha, Terazono Hideyuki, Fumimasa Nomura, Tomoyuki Kaneko, Sari E Lauri, Sami Franssila, Claudio Rivera, Kenji Yasuda and Henri J Huttunen: Microtechnologies to fuel neurobiological research with nanometer precision, Journal of Nanobiotechnology, 2013, Vol 11, DOI: 10.1186/1477-3155-11-11

Ciprian Iliescu, Hayden Taylor, Matioara Avram, Jianmin Miao, Sami Franssila: A practical guide for the fabrication of micro- and nano-fluidic devices using glass and silicon, Biomicrofluidics 6, 016505 (2012)

Tuukka Verho, Chris Bower, Piers Andrew, Sami Franssila, Olli Ikkala and Robin H. A. Ras: Mechanically Durable Superhydrophobic Surfaces, Advanced Materials (2011) 23, pp. 673-678. http://dx.doi.org/10.1002/adma.201003129

Sikanen, T., Franssila, S., Kauppila, T., Kostiainen, R., Kotiaho, T., Ketola, R.: Microchip technology in mass spectrometry, Mass Spectrometry Reviews, 2010, pp.351-391, 10.1002/mas.20238

Original articles in peer reviewed journals 2013-2019

165. Anas Al-Azawi, Zoran Cenev, Topi Tupasela, Bo Peng,Ville Jokinen, Quan Zhou, Sami Franssila and Robin. H. A. Ras: Tunable and Magnetic Thiol-ene Micropillar Arrays, accepted in Macromolecular Rapid Communications, 2019
164. Ville Rontu, Ville P.Jokinen, S. Franssila: Scalable superomniphobic surfaces, JMEMS
Vol. 29, pp. 54-61,2020, DOI: 10.1109/JMEMS.2019.2950769
163. Joonas J. Heikkinen, Emilia Peltola,Niklas Wester, Jari Koskinen, Tomi Laurila, Sami Franssila, Ville Jokinen: Fabrication of Micro- and Nanopillars from Pyrolytic Carbon and
Tetrahedral Amorphous Carbon, accepted in Micromachines 2019
162. Daniel Veira Canle, Tuukka Kekkonen, Joni Mäkinen, Tuomas Puranen,
Heikki J. Nieminen, Antti Kuronen, Sami Franssila, Tapio Kotiaho, Ari Salmi &
Edward Hæggström: Practical realization of a sub-λ/2 acoustic jet, accepted in Scientific Reports, 2019
161. Anand Tatikonda, Ville P Jokinen, Hanno Evard, Sami Franssila:
Sacrificial layer technique for releasing metallized multilayer SU-8 devices,
accepted for publication in Micromachines, 2018
160. Sampo Tuukkanen, Khan Ahsan, Uddin, Jahangiri Farzin, Franssila Sami, Orlando Rojas: Disposable microfluidic sensor based on nanocellulose for glucose detection, accepted in
Global Challenges, 2018
159. Petteri Halli, Joonas J. Heikkinen, Heini Elomaa, Benjamin P. Wilson, Ville Jokinen, Kirsi Yliniemi, Sami Franssila and Mari Lundström: Platinum recovery from Industrial Process
Solutions by Electro-deposition-Redox Replacement, ACS Sustainable Chemistry
& Engineering, Volume: 6 Issue: 11 Pages: 14631-14640, 2018
158. Joonas Heikkinen, Anastasia Ludwig, Tatiana Sukhanova, Shokoufeh Khakipour, Sung Il
Kim, Jeon Geon Han, Henri Huttunen, Sari Lauri, Claudio Rivera, Ville Jokinen, Sami
Franssila: Fabrication of thin film carbon microelectrodes for bioelectrical measurements, Diamond and related materials, 2018, https://doi.org/10.1016/j.diamond.2018.09.024
157. Ekaterina Osmekhina,Christopher Jonkergouw, Georg Schmidt, Farzin Jahangiri, Ville P. Jokinen, Sami Franssila & Markus B. Linder: Stable and Continuing Communication Between
Bacterial Communities in a Microfluidic Device. Accepted for publication in CommsBio
2018
156. Samineh Barmaki, Ville Jokinen, Daniela Obermaier, Daria Blokhina, Matti Korhonen,
Robin H. A. Ras, Jyrki Vuola, Sami Franssila, Esko Kankuri: A microfluidic oxygen sink to create a
targeted cellular hypoxic microenvironment under ambient atmospheric conditions, accepted in Acta Biomaterialia, 2018
155. Ville Rontu, Anton Nolvi, Ari Hokkanen, Edward Haeggström, Ivan Kassamakov and Sami
Franssila: Elastic and fracture properties of free-standing amorphous ALD
Al2O3 thin films measured with bulge test, accepted in Materials Research Express, 2018
154. V. Rontu, P. Sippola, M. Broas, G. Ross, T. Sajavaara, R. L. Puurunen, H. Lipsanen, M. Paulasto-Kröckel,S. Franssila: Atomic layer deposition of AlN from AlCl3, Journal
of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 36, 021508
(2018)
153. Sasha Hoshian, Esko Kankuri, Robin H.A. Ras, Sami Franssila, Ville Jokinen:
Superhydrophobic and blood repellent tubes, Scientific Reports Volume: 7,
Article Number: 16019; 2017
152. Peltola,Emilia; Heikkinen, Joonas; Sovanto, Katariina; Sainio, Sami; Aarva, Anja; Franssila,
Sami; Jokinen, Ville; Laurila, Tomi: SU-8 Based Pyrolytic Carbon for the
Electrochemical Detection of Dopamine, J.Mater.Chem. B, Volume: 5, pp. 9033-9044
151. Ville Rontu, Anne Selent, Gianmario Scotti,Ville-Veikko Telkki, Vladimir V. Zhivonitko, Igor V. Koptyug, Sami Franssila: Atomic layer deposited platinum
nanoparticles on oxide support for catalytic microreactors, Chemistry: A
European Journal,Volume: 23, pp. 16835-16842, 2017
150. Anas Al-Azawi, Mika Latikka, Ville Jokinen, Sami Franssila, Robin Ras: Friction
and wetting transitions of magnetic droplets on micropillared superhydrophobic
surfaces, Small, Vol 13, Issue: 38, UNSP 1700860 Small, 2017
149. K. Lipponen, S. Tähkä, T. Sikanen, V. Jokinen, A. Tatikonda, S. Franssila, R. Kostiainen
and T. Kotiaho: Thiol-ene micropillar electrospray ionization platform for zeptomole
level bioanalysis, Analyst, 2017, 142, pp. 2552 – 2557
148. Merlin Raud, Kätlin Pitman, Gianmario Scotti, Ville P. Jokinen, Sami
Franssila, Jaak Nerut, Enn Lust, Timo Kikas: Electrochemical
Characterization of the Microfabricated Electrochemical Sensor-Array system, Electroanalysis
29, SI pp. 249-258, 2017
147. Sasha Hoshian, Cristina Gaspar, Teemu Vasara, Farzin Jahangiri, Ville Jokinen and
Sami Franssila: Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching,
Micromachines 2016, 7, article 222
146. Cristina Gaspar, Tiina Sikanen, Sami Franssila,Ville Jokinen: Inkjet Printed Silver Electrodes on
Macroporous Paper for a Paper-Based Isoelectric Focusing Device, Biomicrofluidics
10, 064120 (2016)
145. Maria Berdova, Xuwien Liu, Claudia Wiemer, Alessio Lamperti, Grazia Tallarida, Elena Cianci, Marco Fanciulli, Sami Franssila: Hardness, elastic modulus and wear resistance of hafnium oxide-based films grown by atomic layer deposition,
J.Vac.Sci.Technol. A 34, 051510 (2016); doi: 10.1116/1.4961113
144. Sasha Hoshian, Ville Jokinen, Sami Franssila: Robust hybrid elastomer/metal-oxide superhydrophobic surfaces, Soft Matter, 2016, 12, 6526-6535, DOI:
10.1039/C6SM01095D
143. Rajala, Satu; Siponkoski, Tuomo; Sarlin, Essi; Mettänen, Marja; Vuoriluoto, Maija; Pammo, Arno; Juuti, Jari; Rojas, Orlando; Franssila, Sami; Tuukkanen, Sampo: Cellulose nanofibril
film as a piezoelectric sensor material, ACS Appl. Mater. Interfaces 2016, 8,
15607−15614, DOI: 10.1021/acsami.6b03597
142. Tero Kämäräinen, Lokanathan R. Arcot, Leena-Sisko Johansson, Joseph
Campbell, Tekla Tammelin, Sami Franssila, Janne Laine, Orlando J. Rojas: UV-ozone
patterning of micro-nano fibrillated cellulose (MNFC) with alkylsilane
self-assembled monolayers, Cellulose
(2016) pp. 1847–1857, DOI 10.1007/s10570-016-0942-x
141. Maria Berdova, Claudia Wiemer, Alessio Lamperti; Grazia Tallarida, Elena Cianci, Luca Lamagna, Stefano Losa; Silvia Rossini; Roberto Somaschini; Salvatore Gioveni;
Marco Fanciulli, Sami Franssila: Protective coatings of hafnium
dioxide by atomic layer deposition for microelectromechanical systems
applications, Applied Surface Science, Vol 368, 2016, pp. 470–476
140. Prasanna Sakha, Aino Vesikansa, Ester Orav, Joonas
Heikkinen, Ville Jokinen, Tiina-Kaisa Kukku-Lukjanov, Alexandra Shintyapina, Sami
Franssila, Henri J. Huttunen, Sari E. Lauri, Axonal Kainate Receptors Modulate the Strength
of Efferent Connectivity by Regulating Presynaptic Differentiation, Frontiers in Neuroscience, 2016;
doi:10.3389/fncel.2016.00003
139. S. Hoshian, V.Jokinen, K. Hjort, R.H.A. Ras, S. Franssila: Amplified and Localized Photo-Switching of Atomic Layer Deposited TiO₂ by Micro -and Nanostructuring, ACS Applied Materials and Interfaces, 2015, 7, 15593−15599

138. Nina Nordman, Susanna Laurén, Tapio Kotiaho, Sami Franssila, Risto Kostiainen, Tiina Sikanen: Interfacing Microchip Isoelectric Focusing with On-chip Electrospray Ionization Mass Spectrometry, accepted in Journal of Chromatography A, 2015

137. Sung Il Kim, Bibhuti Bhusan Sahu, Byung Mook Weon, Jeon Geon Han, Jari Koskinen, and Sami Franssila: Making porous conductive carbon films with unbalanced magnetron sputtering, Japanese Journal of Applied Physics, 2014

136. Hoshian, Sasha, Jokinen, Ville, Somerkivi, Villeseveri, Lokanathan, Arcot, Franssila, Sami: Robust Superhydrophobic Silicon Without a Low Surface-Energy Hydrophobic Coating, ACS Applied Materials & Interfaces, 2015, Pages: 941-949

135. Aneliya Karadzhinova, Timo Hilden, Maria Berdova, Rauno Lauhakangas, Jouni Heino, Eija Tuominen, Sami Franssila, Edward Häggström, Ivan Kassamakov: Calibrating an optical scanner for quality assurance of large area radiation detectors, Measurement Science and Technology, 2014

134. Gianmario Scotti, Ville Matilainen, Petri Kanninen, Heidi Piili, Antti Salminen, Tanja Kallio, Sami Franssila: Laser Additive Manufacturing of Micro Fuel Cells, in J.Power Sources, 2014

133. Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila: Simple Stacking Method for Silicon Micro Fuel Cells, Micromachines, 2014

132. Maria Berdova, Oili M. E. Ylivaara, Ville Rontu, Pekka T. Törmä, Riikka L. Puurunen, Sami Franssila: Fracture properties of atomic layer deposited aluminum oxide free-standing membranes, J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015

131. Berdova, Maria; Perros, Alexander; Kim, Wonjae; Riikonen, Juha; Ylitalo, Tuomo; Heino, Jouni; Li, Changfeng; Kassamakov, Ivan; Haeggstroem, Edward; Lipsanen, Harri; Franssila, Sami: Exceptionally Strong and Robust Millimeter-Scale Graphene-Alumina Composite Membranes, Nanotechnology 25 (2014) 355701 (7pp)

130. J. Lyytinen, M. Berdova, P. Hirvonen, X.W. Liu , S. Franssila, Q. Zhou and J. Koskinen: Interfacial mechanical testing of atomic layer deposited TiO₂ and Al₂O₃ on silicon substrate by the use of embedded SiO₂ microspheres, RSC Advances, 2014

129. Akanksha Singh, Gianmario Scotti, Tiina Sikanen, Ville P. Jokinen, Sami Franssila: Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips, Micromachines 2014, 5(3), 472-485; doi:10.3390/mi5030472

128. Ville-Veikko Telkki, Vladimir V. Zhivonitko, Anne Selent, Gianmario Scotti, Jarmo Leppäniemi, Sami Franssila, Igor V. Koptyug: Lab-on-a-Chip Reactor Imaging with Unprecedented Chemical Resolution by Hadamard-Encoded Remote Detection NMR, Angewandte Chemie, Vol 126 (2014) pp. 11471–11475

127. Nordman, Nina; Barrios-Lopez, Brianda; Laurén, Susanna; Suvanto, Pia; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto; Sikanen, Tiina: Shape-Anchored Porous Polymer Monoliths for Integrated Online Solid-Phase Extraction-Microchip Electrophoresis-Electrospray Ionization Mass Spectrometry, Electrophoresis, 2014

126. Juan Li, Xuelin Tian, Alexander Pyymaki Perros, Sami Franssila, Ville Jokinen: Self-Propelling and Positioning of Droplets Using Continuous Topography Gradient Surface, Advanced Materials Interfaces (admi.201400001R1), 2014

125. Maryam Borghei, Gianmario Scotti, Petri Kanninen, T. Weckman, Iyya V. Anoshkin, Albert G. Nasibulin, Sami Franssila, Esko I. Kauppinen, Virginia Ruiz: Enhanced performance of silicon microfabricated DMFC by PtRu anode catalysis supported on carbon nanotubes, Energy 65 (2014) pp. 612-620

124. Maria Berdova, Tuomo Ylitalo, Ivan Kassamakov, Jouni Heino, Pekka T. Törmä, Lauri Kilpi, Helena Ronkainen, Jari Koskinen, Edward Hæggström, Sami Franssila: Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques, Acta Materialia 66 (2014) 370–377

123. Jussi Lyytinen, Maria Berdova, Sami Franssila, Jari Koskinen: Adhesion Testing of ALD TiO₂ on Glass Substrate by the Use of Embedded SiO₂ Microspheres, J.Vac.Sci.Technol. A 32, 01A102 (2014); doi: 10.1116/1.4827197

122. Kalle Hanhijärvi, Ivan Kassamakov, Juha Aaltonen, Ville Heikkinen, Lauri Sainiemi, Sami Franssila and Edward Hæggström: Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry, IEEE-ASME Transactions on Mechatronics 18 (2013) pp. 1418-1420, DOI: 10.1109/TMECH.2012.2235080

121. Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila: Bulk aluminum micromachining for high performance micro fuel cells, J.MEMS 2014 Vol. 23, No. 2, p. 372

120. M. Wirtssohn, M. Haapala, L. Sainiemi, S. Franssila: Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry, J. Micromech. Microeng. 23 (2013) 074006 (6pp)

119. Ville Jokinen, Pia Suvanto, Anshul Rao Garapaty, Jussi Lyytinen, Jari Koskinen and Sami Franssila: Durable Superhydrophobicity in Embossed CYTOP Fluoropolymer Micro and Nanostructures; Colloids and Surfaces A: Physicochem. Eng. Aspects 434 (2013) 207– 212

118. Maria Berdova, Jussi Lyytinen, Kestutis Grigoras, Anu Baby, Lauri Kilpi, Helena Ronkainen, Sami Franssila, Jari Koskinen: characterization of thin film adhesion by a MEMS shaft-loading blister testing, J. Vac. Sci. Technol. A 31, 031102 (2013); doi: 10.1116/1.4801921

117. Gianmario Scotti, Daniel Trusheim, Petri Kanninen, Denys Naumenko, Malte Shulz-Ruhtenberg, Valentinas Snitka, Tanja Kallio and Sami Franssila: Picosecond Laser-Ablation for Silicon Micro Fuel Cell, Fabrication, J. Micromech. Microeng. 23 (2013) 055021 (14pp)

116. Vladimir V. Zhivonitko, Ville-Veikko Telkki, Jarmo Leppäniemi, Gianmario Scotti, Sami Franssila &Igor V. Koptyug: Remote detection NMR imaging of gas phase hydrogenation in microfluidic chips, Lab Chip, 2013, pp. 1554 - 1561

115. Ivan Kassamakov, Kestutis Grigoras, Ville Heikkinen, Kalle Hanhijärvi, Juha Aaltonen, Sami Franssila and Edward Hæggström: Non-destructive inspection of buried channels and cavities in silicon, J.MEMS 2013, p. 438

114. Ville Jokinen, Prasanna Sakha, Pia Suvanto, Claudio Rivera, Sami Franssila, Sari E. Lauri and Henri J. Huttunen: A Microfluidic Chip for Axonal Isolation and Electrophysiological Measurements, Journal of Neuroscience Methods, 212 (2013) pp. 276– 282