Recent publications:

Books and book chapters

S. Franssila: Introduction to Microfabrication, 2^nd edition, John Wiley & Sons, 2010

Sami Franssila & Lauri Sainiemi: “RIE”, an entry in Encyclopedia of Micro- and nanofluidics, Dongqing Li, editor, Springer, 2^nd edition 2014

Sami Franssila & Santeri Tuomikoski: “MEMS lithography”, a chapter in Handbook of silicon based MEMS materials and technologies”, Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka (eds.) Elsevier, 2^nd edition 2015

Franz Lärmer, Sami Franssila, Lauri Sainiemi & Kai Kolari: “DRIE”, a chapter in Handbook of silicon based MEMS materials and technologies, Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka (eds.), Elsevier, 2^nd edition 2015

Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen,  Sami Franssila, Mervi Paulasto-Krockel, Veikko Lindroos (eds): Handbook of silicon based MEMS materials and technologies, 2^nd edition, Elsevier 2015

Sami Franssila, Cristina Davis, Michael K. LeVasseur, Zhu Cao, Levent Yobas: Microfluidics and BioMEMS in silicon, a chapter in Veikko Lindroos, Teruaki Motooka, Sami Franssila, Mervi Paulasto-Krockel, Markku Tilli, Veli-Matti Airaksinen, (eds): Handbook of silicon based MEMS materials and technologies, 2^nd edition, Elsevier 2015

Review articles

Cecilia A Brunello, Ville Jokinen, Prasanna Sakha, Terazono Hideyuki, Fumimasa Nomura, Tomoyuki Kaneko, Sari E Lauri, Sami Franssila, Claudio Rivera, Kenji Yasuda and Henri J Huttunen: Microtechnologies to fuel neurobiological research with nanometer precision, Journal of Nanobiotechnology, 2013, Vol 11, DOI: 10.1186/1477-3155-11-11

Ciprian Iliescu, Hayden Taylor, Matioara Avram, Jianmin Miao, Sami Franssila: A practical guide for the fabrication of micro- and nano-fluidic devices using glass and silicon, Biomicrofluidics 6, 016505 (2012)

Tuukka Verho, Chris Bower, Piers Andrew, Sami Franssila, Olli Ikkala and Robin H. A. Ras: Mechanically Durable Superhydrophobic Surfaces, Advanced Materials (2011) 23, pp. 673-678. http://dx.doi.org/10.1002/adma.201003129

Sikanen, T., Franssila, S., Kauppila, T., Kostiainen, R., Kotiaho, T., Ketola, R.: Microchip technology in mass spectrometry, Mass Spectrometry Reviews, 2010, pp.351-391, 10.1002/mas.20238

Original articles in peer reviewed journals 2013-2015

139. S. Hoshian, V.Jokinen, K. Hjort, R.H.A. Ras, S. Franssila: Amplified and Localized Photo-Switching of Atomic Layer Deposited TiO₂ by Micro -and Nanostructuring, ACS Applied Materials and Interfaces, 2015, 7, 15593−15599

138. Nina Nordman, Susanna Laurén, Tapio Kotiaho, Sami Franssila, Risto Kostiainen, Tiina Sikanen: Interfacing Microchip Isoelectric Focusing with On-chip Electrospray Ionization Mass Spectrometry, accepted in Journal of Chromatography A, 2015

137. Sung Il Kim, Bibhuti Bhusan Sahu, Byung Mook Weon, Jeon Geon Han, Jari Koskinen, and Sami Franssila: Making porous conductive carbon films with unbalanced magnetron sputtering, Japanese Journal of Applied Physics, 2014

136. Hoshian, Sasha, Jokinen, Ville, Somerkivi, Villeseveri, Lokanathan, Arcot, Franssila, Sami: Robust Superhydrophobic Silicon Without a Low Surface-Energy Hydrophobic Coating, ACS Applied Materials & Interfaces, 2015, Pages: 941-949

135. Aneliya Karadzhinova, Timo Hilden, Maria Berdova, Rauno Lauhakangas, Jouni Heino, Eija Tuominen, Sami Franssila, Edward Häggström, Ivan Kassamakov: Calibrating an optical scanner for quality assurance of large area radiation detectors, Measurement Science and Technology, 2014

134. Gianmario Scotti, Ville Matilainen, Petri Kanninen, Heidi Piili, Antti Salminen, Tanja Kallio, Sami Franssila: Laser Additive Manufacturing of Micro Fuel Cells, in J.Power Sources, 2014

133. Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila: Simple Stacking Method for Silicon Micro Fuel Cells, Micromachines, 2014

132. Maria Berdova, Oili M. E. Ylivaara, Ville Rontu, Pekka T. Törmä, Riikka L. Puurunen, Sami Franssila: Fracture properties of atomic layer deposited aluminum oxide free-standing membranes, J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015

131. Berdova, Maria; Perros, Alexander; Kim, Wonjae; Riikonen, Juha; Ylitalo, Tuomo; Heino, Jouni; Li, Changfeng; Kassamakov, Ivan; Haeggstroem, Edward; Lipsanen, Harri; Franssila, Sami: Exceptionally Strong and Robust Millimeter-Scale Graphene-Alumina Composite Membranes,  Nanotechnology 25 (2014) 355701 (7pp)

130. J. Lyytinen, M. Berdova, P. Hirvonen, X.W. Liu , S. Franssila, Q. Zhou and J. Koskinen: Interfacial mechanical testing of atomic layer deposited TiO₂ and Al₂O₃ on silicon substrate by the use of embedded SiO₂ microspheres, RSC Advances, 2014

129. Akanksha Singh, Gianmario Scotti, Tiina Sikanen, Ville P. Jokinen, Sami Franssila: Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips, Micromachines 2014, 5(3), 472-485; doi:10.3390/mi5030472

128. Ville-Veikko Telkki, Vladimir V. Zhivonitko, Anne Selent, Gianmario Scotti, Jarmo Leppäniemi, Sami Franssila, Igor V. Koptyug: Lab-on-a-Chip Reactor Imaging with Unprecedented Chemical Resolution by Hadamard-Encoded Remote Detection NMR, Angewandte Chemie, Vol 126 (2014) pp. 11471–11475

127. Nordman, Nina; Barrios-Lopez, Brianda; Laurén, Susanna; Suvanto, Pia; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto; Sikanen, Tiina: Shape-Anchored Porous Polymer Monoliths for Integrated Online Solid-Phase Extraction-Microchip Electrophoresis-Electrospray Ionization Mass Spectrometry, Electrophoresis, 2014

126. Juan Li, Xuelin Tian, Alexander Pyymaki Perros, Sami Franssila, Ville Jokinen: Self-Propelling and Positioning of Droplets Using Continuous Topography Gradient Surface, Advanced Materials Interfaces (admi.201400001R1), 2014

125. Maryam Borghei, Gianmario Scotti, Petri Kanninen, T. Weckman, Iyya V. Anoshkin, Albert G. Nasibulin, Sami Franssila, Esko I. Kauppinen, Virginia Ruiz: Enhanced performance of silicon microfabricated DMFC by PtRu anode catalysis supported on carbon nanotubes, Energy 65 (2014)  pp. 612-620

124. Maria Berdova, Tuomo Ylitalo, Ivan Kassamakov, Jouni Heino, Pekka T. Törmä, Lauri Kilpi, Helena Ronkainen, Jari Koskinen, Edward Hæggström, Sami Franssila:  Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques, Acta Materialia 66 (2014) 370–377

123. Jussi Lyytinen, Maria Berdova, Sami Franssila, Jari Koskinen: Adhesion Testing of ALD TiO₂ on Glass Substrate by the Use of Embedded SiO₂ Microspheres, J.Vac.Sci.Technol.  A 32, 01A102 (2014); doi: 10.1116/1.4827197

122. Kalle Hanhijärvi, Ivan Kassamakov, Juha Aaltonen, Ville Heikkinen, Lauri Sainiemi, Sami Franssila and Edward Hæggström: Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry, IEEE-ASME Transactions on Mechatronics 18 (2013) pp. 1418-1420, DOI: 10.1109/TMECH.2012.2235080

121. Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila: Bulk aluminum micromachining for high performance micro fuel cells, J.MEMS 2014 Vol. 23, No. 2, p. 372

120. M. Wirtssohn, M. Haapala, L. Sainiemi, S. Franssila: Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry, J. Micromech. Microeng. 23 (2013) 074006 (6pp)

119. Ville Jokinen, Pia Suvanto, Anshul Rao Garapaty, Jussi Lyytinen, Jari Koskinen and Sami Franssila: Durable Superhydrophobicity in Embossed CYTOP Fluoropolymer Micro and Nanostructures; Colloids and Surfaces A: Physicochem. Eng. Aspects 434 (2013) 207– 212

118. Maria Berdova, Jussi Lyytinen, Kestutis Grigoras, Anu Baby, Lauri Kilpi, Helena Ronkainen, Sami Franssila, Jari Koskinen: characterization of thin film adhesion by a MEMS shaft-loading blister testing, J. Vac. Sci. Technol. A 31, 031102 (2013); doi: 10.1116/1.4801921

117. Gianmario Scotti, Daniel Trusheim, Petri Kanninen, Denys Naumenko, Malte Shulz-Ruhtenberg, Valentinas Snitka, Tanja Kallio and Sami Franssila: Picosecond Laser-Ablation for Silicon Micro Fuel Cell, Fabrication, J. Micromech. Microeng. 23 (2013) 055021 (14pp)

116. Vladimir V. Zhivonitko, Ville-Veikko Telkki, Jarmo Leppäniemi, Gianmario Scotti, Sami Franssila &Igor V. Koptyug: Remote detection NMR imaging of gas phase hydrogenation in microfluidic chips, Lab Chip, 2013, pp. 1554 - 1561

115. Ivan Kassamakov, Kestutis Grigoras, Ville Heikkinen, Kalle Hanhijärvi, Juha Aaltonen, Sami Franssila and Edward Hæggström: Non-destructive inspection of buried channels and cavities in silicon, J.MEMS 2013, p. 438

114. Ville Jokinen, Prasanna Sakha, Pia Suvanto, Claudio Rivera, Sami Franssila, Sari E. Lauri and  Henri J. Huttunen: A Microfluidic Chip for Axonal Isolation and Electrophysiological Measurements, Journal of Neuroscience Methods, 212 (2013) pp. 276– 282